Nanochrome IV UV Vis - Optical Filter Production System




The Intlvac Nanochrome™ IV UV VIS ion assisted deposition system is Intlvac’s newest precision optical coating platform. The Nanochrome™ IV UV VIS system will make complex optical filters via ebeam evaporation with ion assist under optical control for real time re-optimization or via standard deposition controls.

View NC IV UV VIS Video

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Key Benefits
  • Exceptional process repeatability
  • Baseline uniformity of 2%
  • Automated process control
  • Real time re-optimization
  • 5-12" planets with dual-axis rotation
NCIV filter

The Nanochrome IV UV VIS platform has a number of operator-friendly features: three separate, spring-loaded shutter viewports allow the operator to see the evaporation source, the high current ion source, and the sample stage directly. 

During operation, a rotatable polarizer viewport with a periscope attachment allows for safe, direct viewing of the deposition source. The operator can conduct real-time viewing of the spectra and the system has an adjustable monitoring range from 400 to 1500 nanometers.operator friendly system





Dual Axis Rotation

Including a planetary stage with dual axis rotation and five 12 inch substrate carriers, the system achieves a baseline uniformity of 2%. Each planet can be loaded with one 12" substrate or an array of substrates to maximize coating capacity in each cycle.NCIV planets








Largest Intelligent Cryopump

The Nanochrome IV is the world's first production platform with the latest generation CTI variable speed cryopump.NCIV chamber 





Optical Monitoring

The broadband optical monitoring system provides real time re-optimization of film layers and provides automated process control in reflection or transmission mode. The Intlvac Nanocon interface provides digital control over all processes, one-button automation, and real time datalogging of all critical parameters.

State-of-the-art deposition supplies allow unparalleled control over running processes and temperature control up to 275º Celcius.

NCIV user interface








For more information about creating a custom solution for your application, contact or 1.800.959.5517