nanoquest I SN4055

• Nanoquest I (IBE 1660) (Delivered in 2000)
    - Ar IBE configuration
• Cleanroom installation in USA
    - Photonics industry
• Commercial operation
    - In service since 2000
    - 2 hours per day operation
• Application: LiNbO3 waveguides
    - Photoresist mask
• Working condition
    - Removed from field in working condition
    - Pumps have been upgraded
    - Operationally tested at Intlvac factory
• Equipment risks
    - Power supplies, stage, automation, grids
• Current location
    - Intlvac factory in Toronto area, Canada
• Warranty
• Upgrade options

 

Intlvac is offering this system either 'As Is' OR updated with current components. See below for details.

NANOQUEST I AS IS

CHAMBER:
   •  20” diameter x 18” deep, water-cooled stainless steel
   •  Bottom pump port
   •  Stage assembly mounted on hinged front door for substrate access
   •  Viewport and additional ports for monitoring equipment

VACUUM STATION:
   •  Dry rough/backing pump: Oerlikon LeyboldEcodry40
   •  Cryogenic high vacuum pump: CTI-8 On-Board
   •  Stainless steel valves, tubing, high vacuum gate valve & manifold
   •  Granville-Phillips vacuum gauge controller and monitor

ION BEAM ETCH SOURCE:
   •  DC Kaufman-type permanent magnet ion source
   •  Beam size ≥ 12cm Φ
   •  Pyrolytic Graphite ion optics
   •  Dual switching filament cathode, one filament operates at a time
   •  Ion beam range: 100-1200eV and 0-600mA

IBS-600 SWITCHING TYPE POWER SUPPLY:
   •  Automatic feedback loop beam power regulation
   •  Automatic cathode filament switching
   •  Beam rating: 0-1200V and 0-600mA
   •  Accelerator rating: 0-500V and 0-300mA

  

NEUTRALIZER ELECTRON SOURCE & POWER SUPPLY:
   •  Plasma bridge neutralizer electron source (PBN)
   •  Gas and electric feedthrough with internal cables
   •  Plasma bridge neutralizer power supply: N2000

MODEL 8377 STAGE ASSEMBLY:
   •  Single 4” diameter platen stage
   •  Single axis motorized platen rotation: 0-10rpm
   •  Direct water cooling to platen
   •  Vacuum Dri-chuck interface pads for substrate to platen heat transfer
   •  Manual adjustment of stage incident angle: +/- 90 degrees
   •  Integral stage shutter

GAS DELIVERY:
   •  Mass flow control for ion source operation
   •  Mass flow control for PBN operation
   •  Electro-pneumatic flow control for chamber vent & backfill

ACCESSORIES
   •  Water circulating chiller for stage platen cooling

PROCESS AUTOMATION:
   •  Autovac II control - push button “pump down”, “vent” & “regen” sequencing
   •  Process control – recipes stored in IBS600/N2000 power supply controllers
   •  Integrated safety interlocks and EMO button

 

nanoquest i layout schematic nanoquest i

 

NANOQUEST I UPDATED TO CURRENT COMPONENTS

CHAMBER:
   • 20” diameter x 18” deep, water-cooled stainless steel
   • Bottom pump port
   • Stage assembly mounted on hinged front door for substrate access
   • Viewport and additional ports for monitoring equipment

VACUUM STATION:
   • Dry rough/backing pump: Oerlikon LeyboldEcodry40
   • Cryogenic high vacuum pump: CTI-8 On-Board
   • Stainless steel valves, tubing, high vacuum gate valve & manifold
   • Granville-Phillips vacuum gauge controller and monitor

ION BEAM ETCH SOURCE:
   • DC Kaufman-type permanent magnet ion source
   • Beam size ≥ 12cm Φ
   • Molybdenumion optics
   • Dual switching filament cathode, one filament operates at a time
   • Immersed filament neutralizer electron source
   • Ion beam range: 100-1200eV and 0-800mA

GIBS1000 SWITCHING TYPE POWER SUPPLY:
   • Automatic feedback loop beam power regulation
   • Automatic cathode filament switching
   • Beam rating: 0-1200V and 0-1000mA
   • Accelerator rating: 0-600V and 0-1000mA
   • Filament neutralizer emission current regulation

  

GAS DELIVERY:
   • Mass flow control for ion source operation
   • Electro-pneumatic flow control for chamber vent & backfill

MODEL GEN IV Pico STAGE ASSEMBLY:
   • Single 4” diameter platen stage
   • Single axis motorized platen rotation: 0-30rpm
   • Direct water cooling to platen
   • Vacuum dri-chuck interface pads for substrate to platen heat transfer
   • Manual adjustment of stage incident angle: +/- 120 degrees
   • Integral stage shutter

ACCESSORIES
   • Water circulating chiller for stage platen cooling

PROCESS AUTOMATION:
   • GIBSDC 1200 Nanocon control – automatic and manual modes
   • Windows-based GUI interface on a color 17” wide flat panel touch screen display
   • One touch automation for pump-down, gas flow, pre-process conditioning, ion beam etch
run(s), and venting.
   • Simple menu driven interface to define process recipes, process timing and sequencing
   • Real time numerical and graphical presentation of operational status and process
measurements
   • Integrated safety interlocks and EMO button

 

NANOQUEST I AS IS

PRODUCT DESCRIPTION CONDITION
Model Nanoquest I (1660)  
Year built or rebuilt 2000  
Trade-in Basis Nanoquest I job 4055 working
Chamber 20"Φ x 18"deep, SS, front access door original
Rough/backing pump, upgrade Oerlikon Leybold Ecodry40 new
High vacuum pump, upgrade CTI onboard Cryotorr 8F rebuilt
Gate Valve SS, VAT original
100mmΦ, single Wafer, water cooled, rotation, manual angle tilt 8377 original
Ion source DC discharge w/dual cathode filaments original
Ion optics Pyrolytic graphite, 2G, PG0 original
Neutralizer Non-immersed, PBN original
Power Supply IBS600 / N2000 original
MFC and gas line Ion source, Ar original
Stage chiller, upgrade 1100W cooling capacity new
Automation Autovac II original
International transformer NA to world new
Tests and Qualification FAT/SAT TBD
Warranty 30 days  
Price (US$), Ex Works Canada Inquire "As is"
     
Shipping & Insurance Extra cost  
Installation Extra cost  
Terms and conditions Progress payments (30/60/10)  
     
Factory Upgrade Options    
100mmΦ, single Wafer, water cooled, rotation, manual angle tilt GenIV-Pico, standard Nanoquest Pico new
Filament neutralizer & power supply Filament / GIBSDC1200 new
Non-immersed neutralizer & power supply PBES20 / PBES 2000 new
Ion optics, self-aligned Molybdenum, 2G MD50 new
Current Intlvac automation & control system standards, (NQI) Nanocon GIBSDC1200 new
nanoquest i nanoquest i

 

NANOQUEST I UPDATED TO CURRENT COMPONENTS

PRODUCT DESCRIPTION CONDITION
Model Nanoquest I  
Year built or rebuilt 2000  
Trade-in Basis Nanoquest I job 4055 working
Chamber 20"Φ x 18"deep, SS, front access door original
Rough/backing pump, upgrade Oerlikon LeyboldEcodry40 new
High vacuum pump, upgrade CTI onboard Cryotorr 8F rebuilt
Gate Valve SS, VAT original
100mmΦ, single Wafer, water cooled, rotation, manual angle tilt GenIV-Pico, standard Nanoquest I/Pico new
Ion source DC discharge w/ dual cathode filaments original
Ion optics Molybdenum, 2G, MD50 new
Neutralizer Immersed filament new
Power Supply GIBSDC1000 new
MFC and gas line Ion source, Ar original
Stage chiller, upgrade 1100W cooling capacity new
Current Intlvac automation & control system standards, (NQI) NanoconGIBSDC1200 new
International transformer NA to world new
Tests and Qualification FAT/SAT TBD
Warranty One year  
Price (US$), Ex Works Canada Inquire Updated
     
Shipping & Insurance Extra cost  
Installation Extra cost  
Terms and conditions Progress payments (30/60/10)  
     
Factory Upgrade Options    
Non-immersed neutralizer & power supply PBES20 new

For more information about this system or creating a custom solution for your application, contact sales@intlvacthinfilm.ca or 1.800.959.5517