AMS4200 Etcher
AMS4200
AMS4200 EtcherAMS4200 Etcher

 

Alcatel AMS4200 Multi-Chamber Plasma Etching System

The AMS4200 offers superior process performance including very high etch rates, high mask selectivity, excellent etch uniformity and profile controls. Silicon (Si) and Silicon On Insulator (SOI) are the most frequently used materials for MEMS fabrication. Manufacturers of MOEMS or BioMEMS devices often use other materials like silicon Dioxide (SiO2) or glass wafers.

If you are interested in this or any refurbished systems offered here, contact dino@intlvac.com.

 

Process Modules Included:

Process Module#1 - SiO2 Etch (RGV) Dielectric Etcher

1.    Process Module – Source
       -    High pressure RIE source reactor
2.    Process Module – Substrate Holder
       -    Substrate holder with mechanical clamping chuck for 150mm wafers
       -    Bias: 600W LF
3.    Reactor Pumping
       -    Adixen RVP 2033C2 with DE 2 filter
       -    DN 40 throttle valve
4.    Gas Lines
       -    4 UNIT mfc’s, installed in a gas cabinet.
       -    Gas#1: CF4 – 50 sccm – type: 1.
       -    Gas#2: O2 – 300 sccm – type: 1.
       -    Gas#3: CHF3 – 50 sccm – type: 1.
       -    Gas#4: He – 300 sccm – type: 1.
5.    End Point Detection
       -    AMMS could supply the Semisysco Smart EPD TM 3000 as an option

 

Miscellaneous

1.    GUI (Graphic User Interface)
       -    Industrial PC
       -    Windows 2000 US & Alcatel GUI
       -    2 – 17” TFT color monitors (touch screen & keyboard) with trolley
       -    Telediagnostic (modem & software)
       -    Network capability with host computer by SECSII/GEM and/or HSMS Interface
2.    Documentation
       -    All relevant document and operations manuals

 

Process Module#2 - Silicon Etcher

1.    Process Module – Source
       -    Cryo temperature process
       -    High-density, low-pressure ICP plasma source
       -    Source: 3 kW RF & Auto matching network
       -    Laser view port adapter on top of the source

2.    Process Module – Substrate Holder
       -    Cryogenic substrate holder with mechanical clamping chuck for 150 mm wafers
       -    Pumping line to pump down the substrate holder
       -    He backside cooling
       -    Bias: 300 W RF
       -    LN2 controlled cooling
       -    Deware LN2 tank

3.    Reactor Pumping
       -    Process module ADP122 (100 m3/h)
       -    Maglev turbomolecular pump ATH 1600M (1600 L/s)
       -    DN 200 heated throttle & isolation valve VAT series 65 + by-pass
       -    Pumping line is equipped with a cold trap which is installed before the dry pump

4.    Gas Lines
       -    2 UNIT mfc’s, installed in the main frame & equipped with manometers
       -    Gas#1: SF6 – 300 sccm – type: 1. Unit UFC 8105
       -    Gas#2: O2 – 20 sccm – type: 1. Unit UFC 8105
       -    Gas#3: O2 – 1000 sccm – for plasma cleaning. Unit UFC 8105

5.    Control Module
       -    Separate electrical cabinet including RF generators, PLC, breakers

Transfer & Load Lock Module

1.    Load Lock Module – Left
       -    Front mounted Vacuum Load Lock type Brooks VCE6
       -    Load lock chamber 150mm wafers
       -    Automatic door for easy operator access
       -    Automatic wafer mapping
       -    Slow venting with N2 filter
2.    Load Lock Module – Right
       -    Front mounted Vacuum Load Lock type Brooks VCE6
       -    Load lock chamber for 150mm wafers
       -    Automatic door for easy operator access
       -    Automatic wafer mapping
       -    Slow venting with N2 filter
3.    Transfer Module
       -    Transfer Module type MX600 Brooks cluster platform
       -    Four (4) process module ports capability
       -    Brooks MAG 7 handling robot
       -    End effector for 150mm wafers
       -    Isolation/connection valves are rectangular VAT series 02 slot valve (SEMI standard)
       -    Integrated wafer aligner
4.    Load Lock & Transfer Module Pumping
       -    Alcatel A100L Dry Pumps
       -    Maglev Turbomolecular pump ATH 400 (400 L/s)
5.    Front panel
       -    Aluminum white painted front panel with light tower

 

Etcher Spare Parts

 

etcher spare parts

etcher spare parts

etcher spare parts

etcher spare parts

etcher spare parts

etcher spare parts