Dual Axis Rotation

Including a planetary stage with dual axis rotation and five 12 inch substrate carriers, the system achieves a baseline uniformity of 2%. Each planet can be loaded with one 12" substrate or an array of substrates to maximize coating capacity in each cycle.

Optical Monitoring

The broadband optical monitoring system provides real time re-optimization of film layers and provides automated process control in reflection or transmission mode. The Intlvac Nanocon interface provides digital control over all processes, one-button automation, and real time datalogging of all critical parameters.

State-of-the-art deposition supplies allow unparalleled control over running processes and temperature control up to 275º Celcius.

Operator Friendly

The Nanochrome IV UV VIS platform has a number of operator-friendly features: three separate, spring-loaded shutter viewports allow the operator to see the evaporation source, the high current ion source, and the sample stage directly. 

During operation, a rotatable polarizer viewport with a periscope attachment allows for safe, direct viewing of the deposition source. The operator can conduct real-time viewing of the spectra and the system has an adjustable monitoring range from 400 to 1500 nanometers.

Largest Intelligent Cryopump

The Nanochrome IV is the world's first production platform with the latest generation CTI variable speed cryopump.