Nanochrome I

Nanochrome I

Nanochrome™ R&D system (Nanochrome™ I) is an R&D/Pilot Electron Beam Evaporator. A variety of configurations are possible, all tailored to your specific needs. With its small footprint, low cost, and ease of operation, the Nanochrome system is an ideal choice for your research or pilot project.

The instrument rack can be positioned on the left of right or the chamber depending on your needs. Three viewports are strategically placed to allow viewing of evaporation source and substrates. Your system can be designed for a number of different substrate holders such as: flat plate planetary, flip fixture planetary or planetary dome. Substrate revolution and rotation ensures uniform coatings.

substrate holderload lock insert inside chamber

Inside the Nanochrome™, you’ll find IR heaters, quartz crystal sensors, ion sources for etch or assist and fully automated shutters for total process control. The system can be configured with a variety of Physical Vapor Deposition sources such as: thermal evaporation boats, single and multi-hearth electron beam guns, and magnetron sputter guns.

The Nanochrome™ system incorporates a “clam shell” style chamber, which gives you easy access to all parts of the chamber. The system can be configured with a variety of pumping options from large Maglev Turbo pumps to Helium Cryopumps for inert and reactive gases.

Process Methods

  • Ion Beam Assisted Deposition (IBAD)
        
  • Multi-layered E-beam Deposition
  • Thermal Evaporation
 
  • Planar Magnetron Sputtering
  • Co-Evaporation
  
dual ebeam chamber thermal evaporation

Applications

  • Precision Optical Coatings
                             
  • Optical Filters
  • Anti-reflective Coatings
 
  • Superconductors
  • Semiconductors
 
  • Dielectric Materials

For more information about creating a custom solution for your application contact sales@intlvacthinfilmca

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